Technology and Device Modeling in Micro and Nano-electronics: Current and Future Challenges (Q5432103)
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scientific article; zbMATH DE number 5222571
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Technology and Device Modeling in Micro and Nano-electronics: Current and Future Challenges |
scientific article; zbMATH DE number 5222571 |
Statements
Technology and Device Modeling in Micro and Nano-electronics: Current and Future Challenges (English)
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2 January 2008
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nano-electronics
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micro-electronics
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silicon oxidation
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Poisson equation
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Schrödinger equation
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Boltzmann equation
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coupled physical effects
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