Model Development for Atomic Force Microscope Stage Mechanisms
DOI10.1137/05063307XzbMATH Open1223.74004OpenAlexW2155875385MaRDI QIDQ3427801FDOQ3427801
Tathagata de, Ralph C. Smith, J. K. Raye, Andrew G. Hatch, Murti Salapaka, Ricardo C. H. del Rosario
Publication date: 27 March 2007
Published in: SIAM Journal on Applied Mathematics (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1137/05063307x
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