Sliding mode control application to nano positioners

zbMATH Open1132.93312MaRDI QIDQ3437576FDOQ3437576

Authors: Asif Sabanovic, Khalid Abidi, Çağdaş Önal 

Publication date: 9 May 2007

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zbMATH Keywords

sliding mode controlpiezoelectric actuatorslumped parameters

Mathematics Subject Classification ID

Variable structure systems (93B12) Nonlinear systems in control theory (93C10) Application models in control theory (93C95)

Cited In (8)

• Sliding motion accuracy of proxy-based sliding mode control subjected to measurement noise and disturbance
• Adaptive sliding mode control of a high-precision ball-screw-driven stage
• A multi input sliding mode control for Peltier cells using a cold-hot sliding surface
• Terminal sliding mode control with non-symmetric input saturation for vibration suppression of electrostatically actuated nanobeams in the presence of Casimir force
• Enhanced discrete-time sliding mode strategy with application to piezoelectric actuator control
• Robust tracking control of an array of nanoparticles moving on a substrate
• Impulsive control for nanopositioning
• Adaptive PI-based sliding mode control for nanopositioning of piezoelectric actuators

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