Sliding mode control application to nano positioners

MaRDI QIDQ3437576zbMATHFDO

Authors Asif Sabanovic, Khalid Abidi, Çağdaş Önal

Publication date 9 May 2007

zbMATH Keywords

sliding mode controlpiezoelectric actuatorslumped parameters

Mathematics Subject Classification ID

Variable structure systems (93B12) Nonlinear systems in control theory (93C10) Application models in control theory (93C95)

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Cited in

(8)

• A multi input sliding mode control for Peltier cells using a cold-hot sliding surface
• Adaptive PI-based sliding mode control for nanopositioning of piezoelectric actuators
• Impulsive control for nanopositioning
• Enhanced discrete-time sliding mode strategy with application to piezoelectric actuator control
• Adaptive sliding mode control of a high-precision ball-screw-driven stage
• Terminal sliding mode control with non-symmetric input saturation for vibration suppression of electrostatically actuated nanobeams in the presence of Casimir force
• Robust tracking control of an array of nanoparticles moving on a substrate
• Sliding motion accuracy of proxy-based sliding mode control subjected to measurement noise and disturbance

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