Multiscale analysis of nonequilibrium rarefied gas flows with the application to silicon thin film process employing supersonic jet

DOI10.1063/1.1659745zbMATH Open1186.76457OpenAlexW1973167340MaRDI QIDQ3554397FDOQ3554397

Authors: Y. Sakiyama, Shu Takagi, Yoichiro Matsumoto 

Publication date: 22 April 2010

Published in: Physics of Fluids (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1063/1.1659745

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zbMATH Keywords

Monte Carlo methodssupersonic flowhydrogenjetsflow simulationab initio calculationsnonequilibrium flowrarefied fluid dynamicssilicon compounds

Mathematics Subject Classification ID

Monte Carlo methods (65C05) Supersonic flows (76J20) Compressible fluids and gas dynamics (76N99)

Cites Work

• Strategies for efficient particle resolution in the direct simulation Monte Carlo method.
• Variable soft sphere molecular model for inverse-power-law or Lennard-Jones potential
• Dynamic molecular collision (DMC) model for rarefied gas flow simulations by the DSMC method
• Rates of thermal relaxation in direct simulation Monte Carlo methods
• Multistage gas–surface interaction model for the direct simulation Monte Carlo method

Cited In (1)

• Shock structure in low density gas mixture flows over cylinders and plates

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