Multiscale analysis of nonequilibrium rarefied gas flows with the application to silicon thin film process employing supersonic jet

DOI10.1063/1.1659745MaRDI QIDQ3554397zbMATHOpenAlexFDO

Authors Y. Sakiyama, Shu Takagi, Yoichiro Matsumoto

Publication date 22 April 2010

Published in Physics of Fluids (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1063/1.1659745

zbMATH Keywords

Monte Carlo methodssupersonic flowhydrogenjetsflow simulationab initio calculationsnonequilibrium flowrarefied fluid dynamicssilicon compounds

Mathematics Subject Classification ID

Monte Carlo methods (65C05) Supersonic flows (76J20) Compressible fluids and gas dynamics (76N99)

Recommendations

• Towards the development of a multiscale, multiphysics method for the simulation of rarefied gas flows
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• Publication:3035050

Cites work

• Dynamic molecular collision (DMC) model for rarefied gas flow simulations by the DSMC method
• Multistage gas–surface interaction model for the direct simulation Monte Carlo method
• Rates of thermal relaxation in direct simulation Monte Carlo methods
• Strategies for efficient particle resolution in the direct simulation Monte Carlo method.
• Variable soft sphere molecular model for inverse-power-law or Lennard-Jones potential

Cited in

(1)

• Shock structure in low density gas mixture flows over cylinders and plates

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