TWO‐DIMENSIONAL PROCESS SIMULATION USING A QUADRATIC FINITE ELEMENT DISCRETIZATION

DOI10.1108/EB009985MaRDI QIDQ3756467zbMATH OpenOpenAlexFDO

Authors David Collard, J. N. Decarpigny

Publication date 1984

Published in COMPEL: The International Journal for Computation and Mathematics in Electrical and Electronic Engineering (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1108/eb009985

zbMATH Keywords

segregationevaporationfinite element methodmesh refinementsemiconductor device simulationnon-linear diffusion equationself-induced electric fieldcharged vacancies effectsincomplete implicit schemeoxidation growth

Mathematics Subject Classification ID

Nonlinear initial, boundary and initial-boundary value problems for linear parabolic equations (35K60) Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Mesh generation, refinement, and adaptive methods for boundary value problems involving PDEs (65N50) Motion of charged particles (78A35) Applications to the sciences (65Z05)

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Cites work

• scientific article; zbMATH DE number 3679327 (Why is no real title available?)
• Two-Dimensional Concentration Dependent Diffusion

Cited in

(3)

• AN EFFICIENT DIFFUSION ALGORITHM FOR 2‐D VLSI PROCESS MODELING CODE
• Simulation of the postexposure bake process of chemically amplified resists by reaction-diffusion equations
• scientific article; zbMATH DE number 665495 (Why is no real title available?)

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