TWO‐DIMENSIONAL PROCESS SIMULATION USING A QUADRATIC FINITE ELEMENT DISCRETIZATION

DOI10.1108/EB009985zbMATH Open0619.65119OpenAlexW2017249142MaRDI QIDQ3756467FDOQ3756467

Authors: David Collard, J. N. Decarpigny 

Publication date: 1984

Published in: COMPEL: The International Journal for Computation and Mathematics in Electrical and Electronic Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1108/eb009985

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zbMATH Keywords

segregationevaporationfinite element methodmesh refinementsemiconductor device simulationnon-linear diffusion equationself-induced electric fieldcharged vacancies effectsincomplete implicit schemeoxidation growth

Mathematics Subject Classification ID

Nonlinear initial, boundary and initial-boundary value problems for linear parabolic equations (35K60) Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Mesh generation, refinement, and adaptive methods for boundary value problems involving PDEs (65N50) Motion of charged particles (78A35) Applications to the sciences (65Z05)

Cites Work

• Title not available (Why is that?)
• Two-Dimensional Concentration Dependent Diffusion

Cited In (3)

• Simulation of the postexposure bake process of chemically amplified resists by reaction-diffusion equations
• AN EFFICIENT DIFFUSION ALGORITHM FOR 2‐D VLSI PROCESS MODELING CODE
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