TWO‐DIMENSIONAL PROCESS SIMULATION USING A QUADRATIC FINITE ELEMENT DISCRETIZATION
DOI10.1108/eb009985zbMath0619.65119OpenAlexW2017249142MaRDI QIDQ3756467
J. N. Decarpigny, David Collard
Publication date: 1984
Published in: COMPEL - The international journal for computation and mathematics in electrical and electronic engineering (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1108/eb009985
segregationfinite element methodevaporationmesh refinementsemiconductor device simulationnon-linear diffusion equationself-induced electric fieldcharged vacancies effectsincomplete implicit schemeoxidation growth
Nonlinear initial, boundary and initial-boundary value problems for linear parabolic equations (35K60) Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Mesh generation, refinement, and adaptive methods for boundary value problems involving PDEs (65N50) Applications to the sciences (65Z05) Motion of charged particles (78A35)
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