Step bunching during the epitaxial growth of a generic binary-compound thin film

DOI10.1016/J.JMPS.2009.11.007MaRDI QIDQ442034zbMATH OpenOpenAlexFDO

Authors Paolo Cermelli, Michel Jabbour

Publication date 8 August 2012

Published in Journal of the Mechanics and Physics of Solids (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.jmps.2009.11.007

zbMATH Keywords

bunching instabilitychemical vapor depositionehrlichgeneralized Gibbs-Thomson relationschwoebel barrierstep dynamics

Mathematics Subject Classification ID

Stability of dynamical problems in solid mechanics (74H55) Thin films (74K35)

Recommendations

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• A Step‐Flow Model for the Heteroepitaxial Growth of Strained, Substitutional, Binary Alloy Films with Phase Segregation: I. Theory
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Cites work

• A Step‐Flow Model for the Heteroepitaxial Growth of Strained, Substitutional, Binary Alloy Films with Phase Segregation: I. Theory
• A surface chemical potential for elastic solids
• Coherent solid-state phase transitions with atomic diffusion: A thermomechanical treatment
• Configuration forces as basic concepts of continuum physics
• Epitaxy of binary compounds and alloys
• scientific article; zbMATH DE number 430426 (Why is no real title available?)
• scientific article; zbMATH DE number 3771150 (Why is no real title available?)
• Introduction to Step Dynamics and Step Instabilities
• Multispecies epitaxial growth on vicinal surfaces with chemical reactions and diffusion
• Step bunching during the epitaxial growth of a generic binary-compound thin film
• The elastic energy-momentum tensor
• The force on an elastic singularity
• The growth of crystals and the equilibrium structure of their surfaces
• The nature of configurational forces
• The role of the configurational force balance in the nonequilibrium epitaxy of films
• The thermodynamics of elastic materials with heat conduction and viscosity

Cited in

(7)

• The role of processing speed in determining step patterns duringdirectional epitaxy
• Chaotic step bunching during crystal growth
• Epitaxy of binary compounds and alloys
• Step growth and meandering in a precursor-mediated epitaxy with anisotropic attachment kinetics and terrace diffusion
• Step bunching during the epitaxial growth of a generic binary-compound thin film
• A Step‐Flow Model for the Heteroepitaxial Growth of Strained, Substitutional, Binary Alloy Films with Phase Segregation: I. Theory
• Revisiting step instabilities on crystal surfaces. I: Part i: the quasistatic approximation I:

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