Sensitivities of TE-polarized electromagnetic fields to shape changes in diffraction gratings

DOI10.1016/J.ENGANABOUND.2007.05.006MaRDI QIDQ443353zbMATHOpenAlexFDO

Authors Gonzalo R. Feijóo

Publication date 7 August 2012

Published in Engineering Analysis with Boundary Elements (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.enganabound.2007.05.006

zbMATH Keywords

shape analysisinverse problemdiffractionelectromagnetic scatteringmetrologygratingsscatterometry

Mathematics Subject Classification ID

Diffraction, scattering (78A45) Inverse problems (including inverse scattering) in optics and electromagnetic theory (78A46)

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Cites work

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• An application of shape optimization in the solution of inverse acoustic scattering problems
• Exact non-reflecting boundary conditions

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