scientific article; zbMATH DE number 1380006

MaRDI QIDQ4705073zbMATH OpenFDO

Authors R. Sh. Malkovich

Publication date 16 December 1999

zbMATH Keywords

mathematical analysis of atomic diffusion in solidssemiconductors

Mathematics Subject Classification ID

Reaction-diffusion equations (35K57) Research exposition (monographs, survey articles) pertaining to statistical mechanics (82-02) Statistical mechanics of semiconductors (82D37)

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• Single dopant diffusion in semiconductor technology
• Multinary alloys based on III-V semiconductors

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