Free-molecular gas flow through an oscillating membrane

DOI10.1134/S0015462814040127zbMATH Open1301.76067WikidataQ59391613 ScholiaQ59391613MaRDI QIDQ477234FDOQ477234

Authors: V. L. Kovalev, V. V. Kos'yanchuk, A. N. Yakunchikov 

Publication date: 2 December 2014

Published in: Fluid Dynamics (Search for Journal in Brave)

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zbMATH Keywords

membranemicroelectromechanical systemsgas separationfree-molecular flowhigh-frequency oscillations

Mathematics Subject Classification ID

Rarefied gas flows, Boltzmann equation in fluid mechanics (76P05)

Cites Work

• Application of the Cercignani-Lampis scattering kernel to calculations of rarefied gas flows. I: Plane flow between two parallel plates
• Analysis of scattering models on the basis of the results of trajectory calculations
• Scattering properties and scattering kernel based on the molecular dynamics analysis of gas-wall interaction
• Accommodation coefficients for molecular hydrogen on a graphite surface

Cited In (4)

• Title not available (Why is that?)
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• 10.1007/s11446-008-3002-7
• Integral equations for free-molecule flow in MEMS: recent advancements

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