Integral equations for free-molecule flow in MEMS: recent advancements

DOI10.1515/CAIM-2017-0004zbMath1461.65267OpenAlexW2604712118MaRDI QIDQ523555

Attilio Frangi, Patrick Fedeli

Publication date: 21 April 2017

Published in: Communications in Applied and Industrial Mathematics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1515/caim-2017-0004

zbMATH Keywords

boundary integral equationsrarefied gas dynamicsMEMS

Mathematics Subject Classification ID

Numerical methods for integral equations (65R20)

Uses Software

• Gmsh

Cites Work

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• A BEM technique for free-molecule flows in high frequency MEMS resonators
• The Boltzmann equation and its applications
• Polyhedrization of an arbitrary 3D point set.
• BEM approaches and simplified kinetic models for the analysis of damping in deformable MEMS
• Gmsh: A 3-D finite element mesh generator with built-in pre- and post-processing facilities
• A review of the rarefied gas dynamics theory associated with some classical problems in flow and heat transfer

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