A BEM technique for free-molecule flows in high frequency MEMS resonators
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Publication:443447
DOI10.1016/J.ENGANABOUND.2008.08.012zbMATH Open1244.76043OpenAlexW2048968263MaRDI QIDQ443447FDOQ443447
Authors: A. Frangi
Publication date: 7 August 2012
Published in: Engineering Analysis with Boundary Elements (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.enganabound.2008.08.012
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Cites Work
- Title not available (Why is that?)
- The Boltzmann equation and its applications
- Numerical comparison between the Boltzmann and ES-BGK models for rarefied gases
- Multipole BEM for the evaluation of damping forces on MEMS
- On the evaluation of damping in MEMS in the slip-flow regime
- Generalization of Laplace's Expansion to Arbitrary Powers and Functions of the Distance between Two Points
- Title not available (Why is that?)
- Title not available (Why is that?)
- Rarefaction effects on shear driven oscillatory gas flows: A direct simulation Monte Carlo study in the entire Knudsen regime
- A new fast multipole boundary element method for solving 2-D Stokes flow problems based on a dual BIE formulation
- BEM modeling of damping forces on MEMS with thin plates
- A fast multipole implementation of the qualocation mixed-velocity-traction approach for exterior Stokes flows
- Gas flow near a plate oscillating longitudinally with an arbitrary frequency
- Inverted velocity profiles in rarefied cylindrical Couette gas flow and the impact of the accommodation coefficient
- A dual BIE approach for large-scale modelling of 3-D electrostatic problems with the fast multipole boundary element method
- Nonplanar oscillatory shear flow: From the continuum to the free-molecular regime
Cited In (7)
- An analytical and meshless modeling for vibration analysis of an infinite quartz resonator with non-circular electrodes
- Non-continuum effects on a squeezed gas film in a two-dimensional acoustic resonator
- On the evaluation of damping in MEMS in the slip-flow regime
- Boundary Integral Equations and Fluid-Structure Interaction at the Micro Scale
- BEM approaches and simplified kinetic models for the analysis of damping in deformable MEMS
- A fast boundary-finite element approach for estimating anchor losses in micro-electro-mechanical system resonators
- Integral equations for free-molecule flow in MEMS: recent advancements
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