A BEM technique for free-molecule flows in high frequency MEMS resonators

DOI10.1016/j.enganabound.2008.08.012zbMath1244.76043MaRDI QIDQ443447

J. Herrera, H. S. Yoon

Publication date: 7 August 2012

Published in: Engineering Analysis with Boundary Elements (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.enganabound.2008.08.012

zbMATH Keywords

dissipation; MEMS; free-molecule flow

Mathematics Subject Classification ID

76P05: Rarefied gas flows, Boltzmann equation in fluid mechanics

76M15: Boundary element methods applied to problems in fluid mechanics