Sequential Screening in Semiconductor Manufacturing, II: Exploiting Lot-to-Lot Variability
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Publication:4883213
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(6)- Sequential Screening in Semiconductor Manufacturing, I: Exploiting Spatial Dependence
- Knowledge acquisition from batch semiconductor manufacturing data
- Optimal reduction of a spatial monitoring grid: proposals and applications in process control
- Designing repetitive screening procedures with imperfect inspections: an empirical Bayes approach
- Determining the optimal probing lot size for the wafer probe operation in semiconductor manufacturing
- The effect of testing equipment shift on optimal decisions in a repetitive testing process
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