Raising the accuracy of monitoring the optical coating deposition by application of a nonlocal algorithm of data analysis

DOI10.33048/SIBJIM.2020.23.207OpenAlexW4253369737MaRDI QIDQ5055539

A. V. Tikhonravov, Anatoly G. Yagola, Yu. S. Lagutin, A. A. Lagutina, Dmitry V. Lukyanenko, Igor V. Kochikov

Publication date: 9 December 2022

Published in: Sibirskii zhurnal industrial'noi matematiki (Search for Journal in Brave)

Full work available at URL: http://mathnet.ru/eng/sjim1090

zbMATH Keywords

inverse problemcomputational algorithmanalysis of experimental datathin film coating

Mathematics Subject Classification ID

Optics, electromagnetic theory (78-XX) Mechanics of particles and systems (70-XX)

Related Items (1)

Stable method for optical monitoring the deposition of multilayer optical coatings

Cites Work

• Algorithms for solving inverse problems in the optics of layered media based on comparing the extrema of spectral characteristics
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