Optimization models for semiconductor dopant profiling
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Publication:5294091
optimization problemNewton methodscharge densitydoping profilegradient-based methodsGummel iterationsteepest descent approach
Numerical optimization and variational techniques (65K10) Technical applications of optics and electromagnetic theory (78A55) PDEs in connection with optics and electromagnetic theory (35Q60) Motion of charged particles (78A35) Statistical mechanics of semiconductors (82D37) Optimization problems in optics and electromagnetic theory (78M50)
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- Inverse doping profile of MOSFETs via geometric programming
- scientific article; zbMATH DE number 6694738 (Why is no real title available?)
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