scientific article; zbMATH DE number 2201225
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Publication:5313652
zbMATH Open1070.92053MaRDI QIDQ5313652FDOQ5313652
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Publication date: 1 September 2005
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- Simulation of a multi-component transport model for the chemical reaction of a CVD-process
- Applied mathematical models and experimental approaches in chemical science
- Mathematical modeling approaches for optimization of chemical processes
- Discrete formulation of mixed finite element methods for vapor deposition chemical reaction equations
- The modeling of realistic chemical vapor infiltration/deposition reactors
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