scientific article; zbMATH DE number 6431339

MaRDI QIDQ5248174zbMATH OpenFDO

Authors Meraa Arab

Publication date 27 April 2015

zbMATH Keywords

chemical vapor depositionhomogeneous depositionoperator-splitting methodrelaxation scheme

Mathematics Subject Classification ID

General theory of simulation (00A72) Applications of mathematical programming (90C90) Research exposition (monographs, survey articles) pertaining to biology (92-02) Classical flows, reactions, etc. in chemistry (92E20)

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