Optimization of a thin film deposition process using a dynamic model extracted from molecular simulations

DOI10.1016/J.AUTOMATICA.2007.11.017MaRDI QIDQ2440784zbMATH OpenOpenAlexFDO

Authors Cihan Oguz, Martha A. Gallivan

Publication date 19 March 2014

Published in Automatica (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.automatica.2007.11.017

zbMATH Keywords

dynamic modellingmodel reductionmodelling errorsoptimal controlorder reduction

Mathematics Subject Classification ID

Applications of optimal control and differential games (49N90) Thin films (74K35) System structure simplification (93B11)

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Cites work

• A data‐driven approach for reduction of molecular simulations
• Cell-to-cell mapping. A method of global analysis for nonlinear systems
• Control in an Information Rich World
• Discovering Knowledge in Data
• scientific article; zbMATH DE number 5278506 (Why is no real title available?)
• scientific article; zbMATH DE number 46777 (Why is no real title available?)
• Reduction and identification methods for Markovian control systems, with application to thin film deposition

Cited in

(8)

• Optimization problems in the estimation of parameters of thin films and the elimination of the influence of the substrate.
• Post-processing interstitialcy diffusion from molecular dynamics simulations
• High-performance large-scale atomistic simulation of thin films deposition
• Qualitative simulation of the growth of electrolessly deposited Cu thin films
• Reduction and identification methods for Markovian control systems, with application to thin film deposition
• scientific article; zbMATH DE number 6431339 (Why is no real title available?)
• A data‐driven approach for reduction of molecular simulations
• Optimal determination of force field parameters for reduced molecular dynamics model

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