Optimization of a thin film deposition process using a dynamic model extracted from molecular simulations (Q2440784)
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scientific article; zbMATH DE number 6271410
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| English | Optimization of a thin film deposition process using a dynamic model extracted from molecular simulations |
scientific article; zbMATH DE number 6271410 |
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Optimization of a thin film deposition process using a dynamic model extracted from molecular simulations (English)
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19 March 2014
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dynamic modelling
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model reduction
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modelling errors
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optimal control
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order reduction
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0.7273627519607544
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0.7127867341041565
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0.6828483939170837
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0.6754955649375916
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0.6685664057731628
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