Reduction and identification methods for Markovian control systems, with application to thin film deposition

DOI10.1002/RNC.866MaRDI QIDQ4452333zbMATH OpenOpenAlexWikidataFDO

Authors Martha A. Gallivan, Richard M. Murray

Publication date 12 February 2004

Published in International Journal of Robust and Nonlinear Control (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1002/rnc.866

zbMATH Keywords

multi scalemodel reductionkinetic Monte Carlo

Mathematics Subject Classification ID

System structure simplification (93B11) Application models in control theory (93C95) Identification in stochastic control theory (93E12)

Recommendations

• Reduced order modeling and control of thin film growth in an HPCVD reactor
• Low-dimensional approximations of multiscale epitaxial growth models for microstructure control of materials
• Optimization of a thin film deposition process using a dynamic model extracted from molecular simulations
• scientific article; zbMATH DE number 5269089
• Control and optimization of multiscale process systems

Cited in

(4)

• scientific article; zbMATH DE number 5269089 (Why is no real title available?)
• Control and optimization of multiscale process systems
• Optimization of a thin film deposition process using a dynamic model extracted from molecular simulations
• Reduced order modeling and control of thin film growth in an HPCVD reactor

This page was built for publication: Reduction and identification methods for Markovian control systems, with application to thin film deposition

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q4452333)