Pattern scaling effect on the radiative properties of wafer's surface

DOI10.1007/S11431-010-3230-2MaRDI QIDQ617204zbMATH OpenOpenAlexFDO

Authors AiHua Wang, Jiu-Ju Cai

Publication date 21 January 2011

Published in Science China. Technological Sciences (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s11431-010-3230-2

zbMATH Keywords

effective medium theoryfinite-difference time-domain methodpatterned waferradiative propertyresonance cavity effect

Mathematics Subject Classification ID

Electromagnetic theory (general) (78A25) Waves and radiation in optics and electromagnetic theory (78A40) Technical applications of optics and electromagnetic theory (78A55) Finite difference methods applied to problems in optics and electromagnetic theory (78M20)

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