Kinetic plasma simulations for three dielectric etchers

DOI10.1016/J.CPC.2007.02.070MaRDI QIDQ710204zbMATH OpenOpenAlexFDO

Authors D. Kharzeev

Publication date 18 October 2010

Published in Computer Physics Communications (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.cpc.2007.02.070

zbMATH Keywords

particle simulationcapacitively coupled plasmadual-frequencyetcherMonte Carlo collision

Mathematics Subject Classification ID

Statistical mechanics of plasmas (82D10)

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