Kinetic plasma simulations for three dielectric etchers
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Publication:710204
DOI10.1016/j.cpc.2007.02.070zbMath1196.82051MaRDI QIDQ710204
Publication date: 18 October 2010
Published in: Computer Physics Communications (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.cpc.2007.02.070
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