AETHER: A simulation platform for inductively coupled plasma

DOI10.1016/J.JCP.2015.01.027MaRDI QIDQ729097zbMATH OpenOpenAlexFDO

Authors Emre Turkoz, Murat Celik

Publication date 20 December 2016

Published in Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.jcp.2015.01.027

zbMATH Keywords

inductively coupled plasmaion thrusterplasma simulationsRF plasma

Mathematics Subject Classification ID

Statistical mechanics of plasmas (82D10)

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Cites work

• \textit{Pegasus}: a new hybrid-kinetic particle-in-cell code for astrophysical plasma dynamics
• An Iterative Solution Method for Linear Systems of Which the Coefficient Matrix is a Symmetric M-Matrix
• DEMOCRITUS: an adaptive particle in cell (PIC) code for object-plasma interactions
• Electron and ion transport equations in computational weakly-ionized plasmadynamics
• GMRES: A Generalized Minimal Residual Algorithm for Solving Nonsymmetric Linear Systems
• scientific article; zbMATH DE number 991835 (Why is no real title available?)
• scientific article; zbMATH DE number 3825358 (Why is no real title available?)
• scientific article; zbMATH DE number 52101 (Why is no real title available?)
• QUICKPIC: a highly efficient particle-in-cell code for modeling wakefield acceleration in plasmas
• TOKAM-3D: a 3D fluid code for transport and turbulence in the edge plasma of tokamaks
• VORPAL: a versatile plasma simulation code

Cited in

(4)

• Numerical modeling of an inductively coupled plasma torch using OpenFOAM
• AETHER
• CFIRM: an integrated code package for the low-temperature plasma simulation on structured grids
• Three-dimensional discharge simulation of inductively coupled plasma (ICP) etching reactor

Describes a project that uses

Uses Software

• VORPAL
• TOKAM-3D
• QUICKPIC
• COMSOL
• BOUT++
• VTK
• Pegasus
• DEMOCRITUS
• wxWidgets

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