An inverse heat transfer method to provide near-isothermal surface for disc heaters used in microlithography
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Publication:856629
DOI10.1016/j.ijheatmasstransfer.2006.04.019zbMath1113.80326MaRDI QIDQ856629
Satish Karra, Arunn Narasimhan
Publication date: 7 December 2006
Published in: International Journal of Heat and Mass Transfer (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.ijheatmasstransfer.2006.04.019
inverse heat transfer; scale analysis; silicon wafer; microlithography; post-exposure bake; temperature uniformity
80A23: Inverse problems in thermodynamics and heat transfer
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