Solving partial differential equations on irregular domains with moving interfaces, with applications to superconformal electrodeposition in semiconductor manufacturing

DOI10.1016/j.jcp.2008.03.001zbMath1141.82345MaRDI QIDQ933314

Ying Shan, James A. Sethian

Publication date: 21 July 2008

Published in: Journal of Computational Physics (Search for Journal in Brave)

Full work available at URL: https://digital.library.unt.edu/ark:/67531/metadc893148/

zbMATH Keywords

multigrid methods; level set methods; conservative material level set methods; immersed interface methods; semiconductor process; superconformal electrodeposition

Mathematics Subject Classification ID

82D37: Statistical mechanics of semiconductors

65M55: Multigrid methods; domain decomposition for initial value and initial-boundary value problems involving PDEs

82C24: Interface problems; diffusion-limited aggregation in time-dependent statistical mechanics

Related Items

Spectral solutions of self-adjoint elliptic problems with immersed interfaces, An immersed interface method for Stokes flows with fixed/moving interfaces and rigid boundaries, A level-set method for convective-diffusive particle deposition, Multiscale modelling of evolving foams, An algorithm for simulation of electrochemical systems with surface-bulk coupling strategies, A level set method to study foam processing: a validation study

Uses Software

• SuperLU
• IIMPACK

Cites Work

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