Solving partial differential equations on irregular domains with moving interfaces, with applications to superconformal electrodeposition in semiconductor manufacturing
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Publication:933314
DOI10.1016/j.jcp.2008.03.001zbMath1141.82345OpenAlexW2123377007MaRDI QIDQ933314
Publication date: 21 July 2008
Published in: Journal of Computational Physics (Search for Journal in Brave)
Full work available at URL: https://digital.library.unt.edu/ark:/67531/metadc893148/
multigrid methodslevel set methodsconservative material level set methodsimmersed interface methodssemiconductor processsuperconformal electrodeposition
Statistical mechanics of semiconductors (82D37) Multigrid methods; domain decomposition for initial value and initial-boundary value problems involving PDEs (65M55) Interface problems; diffusion-limited aggregation in time-dependent statistical mechanics (82C24)
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