Stochastic modeling of coupled electromechanical interaction for uncertainty quantification in electrostatically actuated MEMS

DOI10.1016/J.CMA.2008.01.005MaRDI QIDQ995302zbMATH OpenOpenAlexFDO

Authors Nitin Agarwal, N. R. Aluru

Publication date 13 September 2010

Published in Computer Methods in Applied Mechanics and Engineering (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.cma.2008.01.005

zbMATH Keywords

polynomial chaosuncertainty propagationlarge deformationmultiphysicsgeometrical uncertaintyLagrangian electrostatic analysisspectral stochastic boundary element method (SSBEM)spectral stochastic finite element method (SSFEM)

Mathematics Subject Classification ID

Electro- and magnetostatics (78A30) Boundary element methods applied to problems in optics and electromagnetic theory (78M15) Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10)

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Cited in

(10)

• Propagation of material and surface profile uncertainties on MEMS micro-resonators using a stochastic second-order computational multi-scale approach
• Uncertainty quantification for a 1D thermo-hyperelastic coupled problem using polynomial chaos projection and \(p\)-FEMs
• A domain adaptive stochastic collocation approach for analysis of MEMS under uncertainties
• A stochastic Lagrangian approach for geometrical uncertainties in electrostatics
• Uncertainty quantification of MEMS using a data-dependent adaptive stochastic collocation method
• A data-driven stochastic collocation approach for uncertainty quantification in MEMS
• A stochastic computational multiscale approach; application to MEMS resonators
• Analysis of the effect of spatial uncertainties on the dynamic behavior of electrostatic microactuators
• On response time reduction of electrothermomechanical MEMS using topology optimization
• Uncertainty modelling and structured singular-value computation applied to an electromechanical system

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