Electrostatic MEMS: modelling, control, and applications
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Publication:3086740
zbMATH Open1219.93087MaRDI QIDQ3086740FDOQ3086740
Publication date: 30 March 2011
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control system architectureelectrostatic microelectromechanical systems (MEMS)high control bandwidth
Design techniques (robust design, computer-aided design, etc.) (93B51) Application models in control theory (93C95)
Cited In (8)
- A general modelling and control framework for electrostatically actuated mechanical systems
- Modeling switching response of torsional micromirrors for optical microsystems
- Mathematical modeling of electrostatic MEMS with tailored dielectric properties
- Output-feedback control of a chaotic MEMS resonator for oscillation amplitude enhancement
- Dynamics of electrostatic microelectromechanical systems actuators
- Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives
- Stochastic modeling of coupled electromechanical interaction for uncertainty quantification in electrostatically actuated MEMS
- A new model for electrostatic MEMS with two free boundaries
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