Electrostatic MEMS: modelling, control, and applications
From MaRDI portal
Publication:3086740
zbMATH Open1219.93087MaRDI QIDQ3086740FDOQ3086740
Authors: Guchuan Zhu 
Publication date: 30 March 2011
Recommendations
- Control of dynamic microsystems
- A general modelling and control framework for electrostatically actuated mechanical systems
- Design and modeling of some sensing and actuating mechanisms for MEMS applications
- Mathematical modeling of electrostatic MEMS with tailored dielectric properties
- The dynamic behavior of a parametrically excited time-periodic MEMS taking into account parametric errors
control system architectureelectrostatic microelectromechanical systems (MEMS)high control bandwidth
Design techniques (robust design, computer-aided design, etc.) (93B51) Application models in control theory (93C95)
Cited In (13)
- A general modelling and control framework for electrostatically actuated mechanical systems
- Modeling switching response of torsional micromirrors for optical microsystems
- Mathematical modeling of electrostatic MEMS with tailored dielectric properties
- Output-feedback control of a chaotic MEMS resonator for oscillation amplitude enhancement
- Control of dynamic microsystems
- Self-oscillation loop design and measurement for an MEMS resonant accelerometer
- Dynamics of electrostatic microelectromechanical systems actuators
- Control of bouncing in MEMS switches using double electrodes
- Flatness-based adaptive fuzzy control of electrostatically actuated MEMS using output feedback
- Optimal shape design of three-dimensional MEMS with applications to electrostatic comb drives
- Design and modeling of some sensing and actuating mechanisms for MEMS applications
- Stochastic modeling of coupled electromechanical interaction for uncertainty quantification in electrostatically actuated MEMS
- A new model for electrostatic MEMS with two free boundaries
This page was built for publication: Electrostatic MEMS: modelling, control, and applications
Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q3086740)
