Electrostatic MEMS: modelling, control, and applications (Q3086740)
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scientific article; zbMATH DE number 5872229
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| English | Electrostatic MEMS: modelling, control, and applications |
scientific article; zbMATH DE number 5872229 |
Statements
30 March 2011
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electrostatic microelectromechanical systems (MEMS)
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high control bandwidth
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control system architecture
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0.7911260724067688
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0.7807741761207581
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0.7597086429595947
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0.7476530075073242
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