Design and modeling of some sensing and actuating mechanisms for MEMS applications (Q651720)
From MaRDI portal
!
This is the item page for this Wikibase entity, intended for internal use and editing purposes. Please use the normal view instead:
scientific article; zbMATH DE number 5989336
| Language | Label | Description | Also known as |
|---|---|---|---|
| default for all languages | No label defined |
||
| English | Design and modeling of some sensing and actuating mechanisms for MEMS applications |
scientific article; zbMATH DE number 5989336 |
Statements
Design and modeling of some sensing and actuating mechanisms for MEMS applications (English)
0 references
18 December 2011
0 references
sensing
0 references
actuating
0 references
bimetal
0 references
MEMS
0 references
capacitance
0 references
0.7069842219352722
0 references
0.7059442400932312
0 references
0.703014612197876
0 references
0.7020954489707947
0 references
