Semiconductor manufacturing scheduling and dispatching

MaRDI QIDQ5479463zbMATH OpenFDO

Authors Michele E. Pfund, John Fowler, Scott J. Mason

Publication date 10 July 2006

zbMATH Keywords

dispatchingschedulingsemiconductor manufacturing

Mathematics Subject Classification ID

Research exposition (monographs, survey articles) pertaining to operations research and mathematical programming (90-02) Deterministic scheduling theory in operations research (90B35)

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Cited in

(15)

• Rule-based scheduling in wafer fabrication with due date-based objectives
• Integration of scheduling and advanced process control in semiconductor manufacturing: review and outlook
• Semiconductor manufacturing automation
• An interactive scheduler for a wafer probe centre in semiconductor manufacturing
• Selection of dispatching rules on multiple dispatching decision points in real-time scheduling of a semiconductor wafer fabrication system
• Dynamic state-dependent dispatching for wafer fabrication
• The infrastructure of the timed EOPNs-based multiple-objective real-time scheduling system for 300 mm wafer fab
• Scheduling algorithms for a semiconductor probing facility
• Hybrid ASP-based multi-objective scheduling of semiconductor manufacturing processes
• A simulation optimization framework to solve stochastic flexible job-shop scheduling problems -- case: semiconductor manufacturing
• Flow shops with reentry: the total weighted completion time objective
• Fifty years of research in scheduling -- theory and applications
• Optimal unrestricted dynamic stochastic scheduling with partial losses of work due to breakdowns
• Vehicle dispatching for highly loaded semiconductor production considering bottleneck machines first
• Multiple-objective scheduling and real-time dispatching for the semiconductor manufacturing system

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