Vehicle dispatching for highly loaded semiconductor production considering bottleneck machines first

DOI10.1007/S10696-005-5992-6MaRDI QIDQ853750zbMATH OpenOpenAlexFDO

Authors Pyung-Hoi Koo, Jaejin Jang, Jungdae Suh

Publication date 17 November 2006

Published in International Journal of Flexible Manufacturing Systems (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s10696-005-5992-6

zbMATH Keywords

Material flowSemiconductor wafer fabricationTheory of constraintsVehicle dispatching

Mathematics Subject Classification ID

Production models (90B30)

Recommendations

• Effective vehicle dispatching method minimising the blocking and delivery times in automatic material handling systems of 300 mm semiconductor fabrication
• Simulation analysis of dispatching rules for an automated interbay material handling system in wafer fab
• Dynamic vehicle allocation control for automated material handling system in semiconductor manufacturing
• Selection of dispatching rules on multiple dispatching decision points in real-time scheduling of a semiconductor wafer fabrication system
• Semiconductor manufacturing scheduling and dispatching

Cites work

• A dispatching method for automated guided vehicles by using a bidding concept
• AGV dispatching based on workload balancing
• An AGV routing policy reflecting the current and future state of semiconductor and LCD production lines
• Connecting transport AMHS in a wafer fab
• Determination of optimal AGV fleet size for an FMS
• Selection of dispatching rules on multiple dispatching decision points in real-time scheduling of a semiconductor wafer fabrication system
• Simulation analysis of dispatching rules for an automated interbay material handling system in wafer fab

Cited in

(8)

• Effectiveness of vehicle reassignment in a large-scale overhead hoist transport system
• Effective overhead hoist transport dispatching based on the Hungarian algorithm for a large semiconductor FAB
• Effective vehicle dispatching method minimising the blocking and delivery times in automatic material handling systems of 300 mm semiconductor fabrication
• Connecting transport AMHS in a wafer fab
• Dynamic vehicle allocation control for automated material handling system in semiconductor manufacturing
• A dynamic WIP control strategy for bottlenecks in a wafer fabrication system
• An analysis of the ceiling height requirement for a large-scale semiconductor fab
• An AGV routing policy reflecting the current and future state of semiconductor and LCD production lines

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