Dynamic vehicle allocation control for automated material handling system in semiconductor manufacturing

DOI10.1016/J.COR.2013.04.007MaRDI QIDQ336517zbMATH OpenOpenAlexFDO

Authors James T. Lin, Cheng-Hung Wu, Chih-Wei Huang

Publication date 10 November 2016

Published in Computers \& Operations Research (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1016/j.cor.2013.04.007

zbMATH Keywords

simulationMarkov decision processAMHSvehicle allocation control

Mathematics Subject Classification ID

Case-oriented studies in operations research (90B90) Resource and cost allocation (including fair division, apportionment, etc.) (91B32) Production models (90B30) Markov and semi-Markov decision processes (90C40)

Recommendations

• Effective vehicle dispatching method minimising the blocking and delivery times in automatic material handling systems of 300 mm semiconductor fabrication
• Dynamic dispatching for interbay automated material handling with lot targeting using improved parallel multiple-objective genetic algorithm
• Vehicle dispatching for highly loaded semiconductor production considering bottleneck machines first
• Simulation analysis of dispatching rules for an automated interbay material handling system in wafer fab
• Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems

Cites work

• scientific article; zbMATH DE number 700091 (Why is no real title available?)
• A genetic algorithm for the vehicle routing problem
• A tabu search heuristic for the multi-depot vehicle routing problem
• Applying a New Device in the Optimization of Exponential Queuing Systems
• Connecting transport AMHS in a wafer fab
• Dynamic load balancing in parallel queueing systems: stability and optimal control
• Markov decision models for the optimal maintenance of a production unit with an upstream buffer
• On determining optimal fleet size and vehicle transfer policy for a car rental company
• Stochastic control of two partially observed competing queues

Cited in

(13)

• Dynamic allocation of one class of material handling devices by dispatching
• Vehicle dispatching for highly loaded semiconductor production considering bottleneck machines first
• Effective vehicle dispatching method minimising the blocking and delivery times in automatic material handling systems of 300 mm semiconductor fabrication
• Robust production capacity planning under uncertain wafer lots transfer probabilities for semiconductor automated material handling systems
• Internal transport in automated semiconductor manufacturing systems. Novel approaches for tactical and operational management
• A queue-based aggregation approach for performance evaluation of a production system with an AMHS
• Modified Hungarian algorithm and fuzzy logic control-based scheduling method for Interbay material handling system
• Connecting transport AMHS in a wafer fab
• Load selection of automated guided vehicles in flexible manufacturing systems
• Dynamic dispatching for interbay automated material handling with lot targeting using improved parallel multiple-objective genetic algorithm
• Desirable policies of a strategic petroleum reserve in coping with disruption risk: a Markov decision process approach
• Dynamic operator assignment based on shifting machine loading
• An AGV routing policy reflecting the current and future state of semiconductor and LCD production lines

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