Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process (Q3298702)

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Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process
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    Development of a Framework for Analyzing Process Monitoring Data with Applications to Semiconductor Manufacturing Process (English)
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    15 July 2020
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    semiconductor manufacturing
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    data mining
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    decision tree
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    artificial neural network
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    Taguchi parameter design
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