Statistical Case Studies for Industrial Process Improvement

DOI10.1137/1.9780898719765MaRDI QIDQ4347083zbMATH OpenOpenAlexFDO

Authors

Publication date 6 August 1997

Full work available at URL https://doi.org/10.1137/1.9780898719765

zbMATH Keywords

case studiesSEMATECH qualification plansemiconductor manufactoring

Mathematics Subject Classification ID

Survival analysis and censored data (62N99) Applications of statistics in engineering and industry; control charts (62P30) Reliability, availability, maintenance, inspection in operations research (90B25) Operations research and management science (90B99)

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Cited in

(6)

• Optimal reduction of a spatial monitoring grid: proposals and applications in process control
• Implementation of design of experiments projects in industry
• Applications of quantitative methods in semiconductor manufacturing
• Statistical Practice in Business and Industry
• scientific article; zbMATH DE number 1206321 (Why is no real title available?)
• An optimal selection of two-level regular single arrays for robust parameter experiments

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