Statistical Case Studies for Industrial Process Improvement
On the 514 pages of this book, 24 case studies taken from semiconductor industry are used to illustrate application of statistical methods for solving idustrial problems. The case studies are classified in Gauge studies (4), Passive data collection (7), Design of experiments (6), Statistical process control (3), Equipment reliability (3), and Comprehensive case study (1). Each class of case studies starts with an introduction. An Appendix contains a brief description of the manufacturing process of integrated circuits and a glossary of statistical terms. Moreover, there are two diskettes with the databases used for analyzing the problems treated in the case studies. The case studies themselves follow the so-called SEMATECH qualification plan, which is a guideline for process and equipment characterization and improvement. This plan was developed by the SEMATECH (SEmiconductor MAnufacturing TECHnology) consortium which was initiated by fourteen companies in the U.S. semiconductor industry and the U.S. government. The SEMATECH consortium was founded in order to provide the U.S. industry with the capability for ``world leadership in semiconductor manufacturing. The book aims at illustrating the benefits to industry from using statistical methods. It gives an overview on industrial statistics, introduces a variety of problems industry is faced with and which are relevant not only for semiconductor manufacturing, and makes accessible a multitude of real databases. Thus it can be looked upon as a valuable source for getting information about the statistical practices in U.S. industries.
- scientific article; zbMATH DE number 1206321
- scientific article; zbMATH DE number 994420
- scientific article; zbMATH DE number 2219840
- scientific article; zbMATH DE number 790007
- Process optimization. A statistical approach.
- scientific article; zbMATH DE number 1049274
- scientific article; zbMATH DE number 810020
- scientific article; zbMATH DE number 47701
- Optimal reduction of a spatial monitoring grid: proposals and applications in process control
- Implementation of design of experiments projects in industry
- Applications of quantitative methods in semiconductor manufacturing
- Statistical Practice in Business and Industry
- scientific article; zbMATH DE number 1206321 (Why is no real title available?)
- An optimal selection of two-level regular single arrays for robust parameter experiments
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