Topology optimization of MEMS considering etching uncertainties using the level-set method

DOI10.1002/NME.4354MaRDI QIDQ2952118zbMATH OpenOpenAlexFDO

Authors Gang-Won Jang, N. P. van Dijk, F. Van Keulen

Publication date 30 December 2016

Published in International Journal for Numerical Methods in Engineering (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1002/nme.4354

zbMATH Keywords

bounded-but-unknown uncertaintyetching uncertaintieslevel-set methodtopology optimization

Mathematics Subject Classification ID

Sensitivity analysis for optimization problems on manifolds (49Q12) Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Micromechanical theories (74A60) Topological methods for optimization problems in solid mechanics (74P15) Finite volume methods applied to problems in solid mechanics (74S10)

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Cites work

• A level set method for structural topology optimization.
• A mixed FEM approach to stress-constrained topology optimization
• scientific article; zbMATH DE number 1302349 (Why is no real title available?)
• scientific article; zbMATH DE number 1300255 (Why is no real title available?)
• scientific article; zbMATH DE number 905274 (Why is no real title available?)
• Manufacturing tolerant topology optimization
• Robust topology optimization accounting for spatially varying manufacturing errors
• Structural design under bounded uncertainty—Optimization with anti-optimization
• Structural optimization using sensitivity analysis and a level-set method.

Cited in

(3)

• Manufacturing tolerant topology optimization
• A projection-based method for topology optimization of structures with graded surfaces
• Topology optimization for optical microlithography with partially coherent illumination

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