Topology optimization for optical microlithography with partially coherent illumination
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Cites work
- A robust computational algorithm for inverse photomask synthesis in optical projection lithography
- Achieving minimum length scale in topology optimization using nodal design variables and projection functions
- Filters in topology optimization
- Generating optimal topologies in structural design using a homogenization method
- Gradient-Based Source and Mask Optimization in Optical Lithography
- Minimum length scale in topology optimization by geometric constraints
- On projection methods, convergence and robust formulations in topology optimization
- The method of moving asymptotes—a new method for structural optimization
- Topology optimization considering material and geometric uncertainties using stochastic collocation methods
- Topology synthesis of large-displacement compliant mechanisms
- Volume preserving nonlinear density filter based on Heaviside functions
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