Topology optimization for optical microlithography with partially coherent illumination (Q6565207)
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scientific article; zbMATH DE number 7874317
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| English | Topology optimization for optical microlithography with partially coherent illumination |
scientific article; zbMATH DE number 7874317 |
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Topology optimization for optical microlithography with partially coherent illumination (English)
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1 July 2024
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topology optimization
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optical microlithography
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partially coherent illumination
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robust source and mask optimization
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MEMS
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0.7447535395622253
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0.6890178322792053
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0.6855794191360474
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0.6798279881477356
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