Solving partial differential equations on irregular domains with moving interfaces, with applications to superconformal electrodeposition in semiconductor manufacturing (Q933314): Difference between revisions
From MaRDI portal
Latest revision as of 13:35, 28 June 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Solving partial differential equations on irregular domains with moving interfaces, with applications to superconformal electrodeposition in semiconductor manufacturing |
scientific article |
Statements
Solving partial differential equations on irregular domains with moving interfaces, with applications to superconformal electrodeposition in semiconductor manufacturing (English)
0 references
21 July 2008
0 references
semiconductor process
0 references
level set methods
0 references
multigrid methods
0 references
superconformal electrodeposition
0 references
conservative material level set methods
0 references
immersed interface methods
0 references
0 references
0 references
0 references
0 references
0 references
0 references
0 references
0 references
0 references
