Dynamics of electrostatic microelectromechanical systems actuators (Q2861712): Difference between revisions

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Property / author: Rui-feng Zhang / rank
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Property / arXiv ID: 1201.5439 / rank
 
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Property / cites work: Q4802400 / rank
 
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Latest revision as of 01:30, 7 July 2024

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Dynamics of electrostatic microelectromechanical systems actuators
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