Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method (Q259298): Difference between revisions
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| Property / DOI | |||
| Property / DOI: 10.1007/s10598-015-9303-0 / rank | |||
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| Property / Mathematics Subject Classification ID: 78A45 / rank | |||
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| Property / Mathematics Subject Classification ID: 78M12 / rank | |||
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| Property / zbMATH DE Number: 6554217 / rank | |||
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| Property / zbMATH Keywords | |||
wave scattering | |||
| Property / zbMATH Keywords: wave scattering / rank | |||
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diffraction | |||
| Property / zbMATH Keywords: diffraction / rank | |||
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integral equations | |||
| Property / zbMATH Keywords: integral equations / rank | |||
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mathematical modeling | |||
| Property / zbMATH Keywords: mathematical modeling / rank | |||
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nanostructures | |||
| Property / zbMATH Keywords: nanostructures / rank | |||
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| Property / MaRDI profile type: MaRDI publication profile / rank | |||
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| Property / full work available at URL: https://doi.org/10.1007/s10598-015-9303-0 / rank | |||
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| Property / OpenAlex ID | |||
| Property / OpenAlex ID: W2320383587 / rank | |||
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| Property / cites work | |||
| Property / cites work: Method of integral equations in the spectral domain for the analysis of plane defects of a substrate / rank | |||
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| Property / cites work | |||
| Property / cites work: Analysis of inhomogeneities on wafers by the integral transform method / rank | |||
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| Property / cites work | |||
| Property / cites work: Principles of Optics / rank | |||
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| Property / cites work | |||
| Property / cites work: Slot Coupling of Rectangular and Spherical Wave Guides / rank | |||
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| Property / DOI: 10.1007/S10598-015-9303-0 / rank | |||
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| links / mardi / name | links / mardi / name | ||
Latest revision as of 12:48, 9 December 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method |
scientific article |
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Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method (English)
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11 March 2016
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wave scattering
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diffraction
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integral equations
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mathematical modeling
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nanostructures
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