Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers (Q1667756): Difference between revisions

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Property / DOI: 10.1016/j.apm.2012.09.064 / rank
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Property / full work available at URL: https://doi.org/10.1016/j.apm.2012.09.064 / rank
 
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Property / OpenAlex ID: W2082894933 / rank
 
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Latest revision as of 02:01, 11 December 2024

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Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers
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    Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers (English)
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    30 August 2018
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    dynamic response
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    micro and nano electromechanical systems
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    micro cantilevers
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    assembled micro cantilever probes (ACPs)
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    GDQM
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    GDQEM
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