Static and dynamic responses of a microcantilever with a T-shaped tip mass to an electrostatic actuation (Q529415): Difference between revisions

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Latest revision as of 19:51, 13 July 2024

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Static and dynamic responses of a microcantilever with a T-shaped tip mass to an electrostatic actuation
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    Static and dynamic responses of a microcantilever with a T-shaped tip mass to an electrostatic actuation (English)
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    18 May 2017
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    MEMS
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    electrostatic
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    static deflection
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    natural frequency
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    pull-in voltage
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    perturbation theory
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    T-shaped mass
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    primary and subharmonic resonances
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