Nonlinear analysis of electrostatically actuated diaphragm-type micropumps (Q331291): Difference between revisions
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scientific article
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English | Nonlinear analysis of electrostatically actuated diaphragm-type micropumps |
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Nonlinear analysis of electrostatically actuated diaphragm-type micropumps (English)
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26 October 2016
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micropump
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electrostatic actuation
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circular diaphragm
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nonlinear analysis
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