Nonlinear analysis of electrostatically actuated diaphragm-type micropumps (Q331291): Difference between revisions
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| Property / cites work: A study of the nonlinear response of a resonant microbeam to an electric actuation / rank | |||
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| Property / cites work: Electrostatic coupling of MEMS structures: Transient simulations and dynamic pull-in / rank | |||
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| Property / cites work: Dynamic pull-in phenomenon in MEMS resonators / rank | |||
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| Property / cites work: Nonlinear dynamic analysis of MEMS switches by nonlinear modal analysis / rank | |||
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| Property / cites work: Coupled vibration of a cantilever micro-beam submerged in a bounded incompressible fluid domain / rank | |||
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Revision as of 19:15, 12 July 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Nonlinear analysis of electrostatically actuated diaphragm-type micropumps |
scientific article |
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Nonlinear analysis of electrostatically actuated diaphragm-type micropumps (English)
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26 October 2016
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micropump
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electrostatic actuation
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circular diaphragm
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nonlinear analysis
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