A simulation system based on mixed-hybrid finite elements for thermal oxidation in semiconductor technology (Q2484843): Difference between revisions

From MaRDI portal
ReferenceBot (talk | contribs)
Changed an Item
Import241208061232 (talk | contribs)
Normalize DOI.
 
Property / DOI
 
Property / DOI: 10.1016/j.cma.2004.02.004 / rank
Normal rank
 
Property / DOI
 
Property / DOI: 10.1016/J.CMA.2004.02.004 / rank
 
Normal rank

Latest revision as of 22:58, 18 December 2024

scientific article
Language Label Description Also known as
English
A simulation system based on mixed-hybrid finite elements for thermal oxidation in semiconductor technology
scientific article

    Statements

    A simulation system based on mixed-hybrid finite elements for thermal oxidation in semiconductor technology (English)
    0 references
    0 references
    0 references
    0 references
    3 August 2005
    0 references
    Dual mixed formulations
    0 references
    Primal hybrid formulations
    0 references
    Dual hybrid formulations
    0 references
    0 references
    0 references
    0 references
    0 references
    0 references
    0 references
    0 references

    Identifiers