Simultaneous potential and circuit solutions for two-dimensional bounded plasma simulation codes (Q676333): Difference between revisions
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Revision as of 02:11, 20 March 2024
scientific article
| Language | Label | Description | Also known as |
|---|---|---|---|
| English | Simultaneous potential and circuit solutions for two-dimensional bounded plasma simulation codes |
scientific article |
Statements
Simultaneous potential and circuit solutions for two-dimensional bounded plasma simulation codes (English)
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6 May 1997
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An algorithm is presented which couples external lumped circuit elements to bounded two-dimensional plasma simulation codes. This allows one to decompose the field solver into a Laplace solver (with boundary conditions eventually on applied potentials) and a Poisson solver (with zero boundary conditions). The method is shown on the simulation of a dually excited capacitively coupled RF discharge. The possibility of applications to a plasma processing reactor is also discussed.
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solver decomposition
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external lumped circuit elements
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Laplace solver
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Poisson solver
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dually excited capacitively coupled RF discharge
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plasma processing reactor
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