The damping in MEMS inertial sensors both at high and low pressure levels (Q840484): Difference between revisions

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+On the evaluation of damping in MEMS in the slip-flow regime
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+Q5736822
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+Analysis of the Air-damping Effect on a Micromachined Beam Resonator
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+Kinetic theory and fluid dynamics
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+Q4492758
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+Microflows and nanoflows. Fundamentals and simulation. Foreword by Chih-Ming Ho.
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