The damping in MEMS inertial sensors both at high and low pressure levels

DOI10.1007/S11071-008-9354-2zbMATH Open1178.74077OpenAlexW1989033210MaRDI QIDQ840484FDOQ840484

Authors: Francesco Braghin, Elisabetta Leo, Ferruccio Resta 

Publication date: 11 September 2009

Published in: Nonlinear Dynamics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s11071-008-9354-2

Recommendations

• Global dynamics and integrity of a micro-plate pressure sensor
• On the evaluation of damping in MEMS in the slip-flow regime
• Analysis of fluid‐structure interaction in low pressure MEMS by Integral Equations
• Multipole BEM for the evaluation of damping forces on MEMS

zbMATH Keywords

Navier-Stokes equationskinetic theory of gasesinertial sensorair dampingMEMS modeling

Mathematics Subject Classification ID

Vibrations in dynamical problems in solid mechanics (74H45) Micromechanics of solids (74M25)

Cites Work

• Microflows and nanoflows. Fundamentals and simulation. Foreword by Chih-Ming Ho.
• Kinetic theory and fluid dynamics
• Title not available (Why is that?)
• On the evaluation of damping in MEMS in the slip-flow regime
• Analysis of the Air-damping Effect on a Micromachined Beam Resonator
• Title not available (Why is that?)

Cited In (3)

• Gas damping force noise on a macroscopic test body in an infinite gas reservoir
• Viscous damping of a mechanical resonator in a gaseous environment
• Uncertainty quantification models for micro-scale squeeze-film damping

This page was built for publication: The damping in MEMS inertial sensors both at high and low pressure levels

Report a bug (only for logged in users!)Click here to report a bug for this page (MaRDI item Q840484)