The damping in MEMS inertial sensors both at high and low pressure levels

DOI10.1007/S11071-008-9354-2MaRDI QIDQ840484zbMATHOpenAlexFDO

Authors Francesco Braghin, Elisabetta Leo, Ferruccio Resta

Publication date 11 September 2009

Published in Nonlinear Dynamics (Search for Journal in Brave)

Full work available at URL https://doi.org/10.1007/s11071-008-9354-2

zbMATH Keywords

Navier-Stokes equationskinetic theory of gasesinertial sensorair dampingMEMS modeling

Mathematics Subject Classification ID

Vibrations in dynamical problems in solid mechanics (74H45) Micromechanics of solids (74M25)

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Cites work

• scientific article; zbMATH DE number 1478496 (Why is no real title available?)
• scientific article; zbMATH DE number 3200444 (Why is no real title available?)
• Analysis of the Air-damping Effect on a Micromachined Beam Resonator
• Kinetic theory and fluid dynamics
• Microflows and nanoflows. Fundamentals and simulation. Foreword by Chih-Ming Ho.
• On the evaluation of damping in MEMS in the slip-flow regime

Cited in

(3)

• Uncertainty quantification models for micro-scale squeeze-film damping
• Viscous damping of a mechanical resonator in a gaseous environment
• Gas damping force noise on a macroscopic test body in an infinite gas reservoir

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