Investigation of plane defects in a dielectric wafer by spectral-domain integral equation method (Q1705387): Difference between revisions
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Property / cites work: Method of integral equations in the spectral domain for the analysis of plane defects of a substrate / rank | |||
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Revision as of 07:36, 15 July 2024
scientific article
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English | Investigation of plane defects in a dielectric wafer by spectral-domain integral equation method |
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Investigation of plane defects in a dielectric wafer by spectral-domain integral equation method (English)
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15 March 2018
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wave scattering
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diffraction
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integral equations
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mathematical modeling
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nanostructures
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