Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers (Q1667756): Difference between revisions

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Revision as of 12:03, 16 July 2024

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Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers
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    Semi-analytic actuating and sensing in regular and irregular MEMs, single and assembled micro cantilevers (English)
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    30 August 2018
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    dynamic response
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    micro and nano electromechanical systems
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    micro cantilevers
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    assembled micro cantilever probes (ACPs)
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    GDQM
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    GDQEM
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