A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology (Q1400232): Difference between revisions
From MaRDI portal
ReferenceBot (talk | contribs) Changed an Item |
Set OpenAlex properties. |
||
Property / full work available at URL | |||
Property / full work available at URL: https://doi.org/10.1016/s0045-7825(02)00574-1 / rank | |||
Normal rank | |||
Property / OpenAlex ID | |||
Property / OpenAlex ID: W2163514936 / rank | |||
Normal rank |
Latest revision as of 10:57, 30 July 2024
scientific article
Language | Label | Description | Also known as |
---|---|---|---|
English | A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology |
scientific article |
Statements
A dual-mixed hybrid formulation for fluid mechanics problems: Mathematical analysis and application to semiconductor process technology (English)
0 references
13 August 2003
0 references
dual-mixed-hybrid formulation
0 references
optimal error estimates
0 references
stress field
0 references
thermal oxidation
0 references
semiconductor technology
0 references
local oxidation structure
0 references
0 references